MSCT-MS060TPL012TC02-CR100

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CR100 is ideal for failure analysis below 130nm technology process.
Standard type has better durability.

Available on Hitachi Nano probing system.
No need to proceed Chemical Clean Process.
Have SEM inspection before packing.
Tip Resistance is under 50ohm.
Have MESOSCOPE unique MST(Micro Surface Treatment) process to increase tip uniformity.
Longer Cone Shrink Length for improving working aspect.
Available to be measured below 130nm device

Material	Tungsten	Coating Material	NA
Wire Diameter ( WD)	0.25mm	Total Probe Length(TPL)	12mm
Tape Cone ( TC)	2mm	Capillary Diameter(CD)	0.6mm
Tape Cone Angle Type		Curvature Radius(CR)	<100nm
Suitable for measuring Process	≤130nm Manufacturing Process

MSCT	-	MS	060	TPL012	TC02	-	CR100
		(1)	(2)	(3)	(4)		(5)

Probe application type: MS is for Hitachi SEM based electrical nano-probing application.
Copper Tube Diameter (CTD): 0.6mm
Total probe length (TPL): 12mm
Tape Cone length (TC): 2mm.
Curvature radius (CR): <100nm.
Diameter at position of 100nm below apex is in the range of 100nm to 200nm.

MESOSCOPE is the world leader in Nano-scale metallic probe manufacturer.

2F.-2, No.9, Zhanye 1st Rd., East Dist., Hsinchu City 30078, Taiwan

886-3-6661059

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