EBAC testing of metal line short

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• 2020-09-16

MESOSCOPE successes to use Kleindiek PS8 system with Mesoscope's tips to do 9mm length EBAC to locate line to line bridge defect position.

First, we suspect the bridge defect might be located in between of via2 layer to Metal2 layer. For avoiding defect be removed during sample preparation, Mesoscope do probe on pad at via 2 layer and it connect to Metal 2. And then doing EBAC to locate bridge position.

The suspect two metal line’s IV curve is direct short. Due to width between two metal line is nearly 100nm, we need to zoom magnification into 2,000x to judge line to line spacer’s EBAC signal. In this case, we perform 3kV election beam to penetrate via layer and available to observe metal layer’s signal flow.

Then, we use EBAC to locate the defect. We find out that there is a suspected signal at 6mm. We check the suspected signal again and zoom in the location to check whether the signal is correct or not. The gray scale of the area between two metal line is closely. And we think it’s the short location. The penetration depth from top of metal 2 is 0.07um. The defect described bridge of line-to-line.

Mesoscope could do approximate 9mm long distance measurement for device measurement or locate the defect position. But it depends on the sample’s size, condition, etc. to know the best way for measurement.

  Following is a brief description about E-Beam application 

  Feel free to contact with MESOSCOPE, if there is any idea or inquiry: +886-3-666-1059