PS8

• Failure analysis
• Qualifying high gate materials
• Low current transistor testing
• Four point probing
• EBIC, EBAC, RCI, EBIV, EBIRCH, and Active Potential Contrast analysis
• Current Imaging
• Characterization of advanced materials and structures e.g. nanowires, ultra thin films
• Nanoscale assembly and manipulation

    Dimension of Prober Shuttle Platform

• Diameter: 140mm
• Height: 10mm

    Substage

• Travel distance of X and Y is 9mm
• Travel distance of Z distance is 0.7mm

    All axes

• Resolution: Linear axes <0.5nm, Rotational axes <8nm
• Speed up to 1mm/s
• Drift <1nm/min
• Cartesian movement
• No backlash or reversal play
• Coarse and fine displacement in one drive
• 27 piezo-driven axes - 0.25 nm resolution

Dimension of Prober Shuttle Platform
• Diameter: 140mm
• Height: 10mm

Precision positioning capabilities
Substage
• Travel distance of X=9mm, Y=9mm, Z=0.7mm
• Resolution of X<0.5nm, Y<0.5nm, Z<0.5nm

Probe
• Operation Rage of X, Y, Z=4.5mm; Raise and Down= 90degree ; In and Protrude=5mm
• Resolution of X<0.5nm, Y<0.5nm, Z<0.5nm, Tilt<8nm, In and Out<0.5nm.
• Speed up to 1 mm/s
• Drift <1nm/min
• Cartesian movement
• No backlash or reversal play
• Coarse and fine displacement in one drive
• 27 piezo driven axes 0.25 nm resolution