Ultra CR5 plus is ideal for failure analysis below 3nm technology process.
Plus type has sharper cone angle and shrink profile body.
- Available on FEI, JEOL, Tescan, Zeiss and Kleindiek systems.
- No need to proceed Chemical Clean Process.
- Have SEM inspection before packing.
- Tip Resistance is under 50ohm.
- Have MESOSCOPE unique MST(Micro Surface Treatment) process to increase tip uniformity.
- Wire diameter option: 0.1mm,0.25mm, 0.3mm, 0.5mm and 0.6mm
- Available to be measured below 3nm device
|Wire Diameter ( WD)||0.25mm||Total Probe Length(TPL)||13mm|
|Tape Cone ( TC)||2.5mm||Tip Body Diameter(TBD)||-|
|Tape Cone Angle Type||-||Curvature Radius(CR)||<5nm|
|Probe Pre-bent||-||Pre-sleeved into Capillary||-|
|Suitable for measuring Process||≤3nm Manufacturing Process|
- Probe application type: SA is for SEM based electrical nano-probing application.
- Probe wire diameter (WD): 0.25mm
- Total probe length (TPL): 13mm
- Tape Cone length (TC): 2.5mm.
- Curvature radius (CR): <5nm.
Diameter at position of 100nm below apex is in the range of 25nm to 35nm.
- Plus Type.
Compare to typical UCR5, the dimension of probe from point to 500nm behind is sharper 25%